专利类型:
相变材料专利导航
公开(公告)号:
US8932901B2
申请日:
2012-04-19
申请局:
US
摘要:
A memory device includes a substrate and a memory array on the substrate. The memory array includes memory cells including stressed phase change materials in a layer of encapsulation materials. The memory cells may include memory cell structures such as mushroom-type memory cell structures, bridge-type memory cell structures, active-in-via type memory cell structures, and pore-type memory cell structures. The stressed phase change materials may comprise GST (GexSbxTex) materials in general and Ge2Sb2Te5 in particular. To manufacture the memory device, a substrate is first fabricated. Memory cells including phase change materials in a layer of encapsulation materials are formed on a front side of the substrate. A tensile or compressive stress is induced into the phase change materials on the front side of the substrate.
原始专利权人:
Huai-Yu Cheng | MACRONIX INTERNATIONAL CO., LTD.
受让人:
MACRONIX INTERNATIONAL CO., LTD.
当前专利权人:
Macronix International Co Ltd