专利类型:
相变材料专利导航
公开(公告)号:
US6742884B2
申请日:
2001-04-19
申请局:
US
摘要:
A method and system for masking a surface to be etched is described. A droplet source ejects droplets of a masking material for deposit on a thin-film or other substrate surface to be etched. The temperature of the thin-film or substrate surface is controlled such that the droplets rapidly freeze upon contact with the thin-film or substrate surface. The thin-film or substrate is then etched. After etching the masking material is removed.
原始专利权人:
XEROX CORP
受让人:
XEROX CORPORATION | BANK ONE, NA, AS ADMINISTRATIVE AGENT | JPMORGAN CHASE BANK, AS COLLATERAL AGENT
当前专利权人:
Xerox Corp