Spatial light modulator using phase-change matertals with improved fill factor

专利类型: 
相变材料专利导航
公开(公告)号: 
US11187891B1
申请日: 
2018-04-10
申请局: 
US
摘要: 
A spatial light modulator includes a substrate, a phase change material cell on the substrate, the phase change material cell including an electrical heater on the substrate, an optical reflector layer on the electrical heater, and a phase change material layer on the optical reflector layer.
原始专利权人: 
HRL LABORATORIES, LLC
受让人: 
HRL LABORATORIES LLC | HRL LABORATORIES, LLC
当前专利权人: 
HRL Laboratories LLC